发明名称 Arrangement for orienting the magnetization direction of magnetic layers
摘要 An arrangement and method orients the magnetization direction of magnetic layers on a plate shaped substrate on a mounting. The mounting defines a positioning plane for the substrate and a magnet arrangement is on one side of the positioning plane. The magnet arrangement has at least three electromagnets whose dipole axes are at least approximately parallel to the positioning plane and, viewed perpendicularly to the positioning plane, define a closed surface.
申请公布号 US6790482(B2) 申请公布日期 2004.09.14
申请号 US20030336514 申请日期 2003.01.03
申请人 UNAXIS BALZERS AKTIENGESELLSCHAFT 发明人 MAASS WOLFRAM
分类号 C23C14/35;H01F13/00;H01F41/14;H01F41/18;H01J37/34;(IPC1-7):B05C11/00 主分类号 C23C14/35
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