发明名称 |
Method and device utilizing plasma source for real-time gas sampling |
摘要 |
Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.
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申请公布号 |
US6791692(B2) |
申请公布日期 |
2004.09.14 |
申请号 |
US20010038090 |
申请日期 |
2001.10.29 |
申请人 |
LIGHTWIND CORPORATION |
发明人 |
POWELL GARY;HAZARD RICHARD L. |
分类号 |
H01L21/3065;G01N1/22;G01N21/68;H01L21/205;(IPC1-7):G01B11/02 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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