发明名称 APPARATUS FOR INSPECTING OPTICAL ELEMENTS IN WHICH LIGHT RADIATED FROM AN OPTICAL MODULE IS TRANSFERRED TO A BEAM SPLITTER THROUGH A FIRST OPTICAL PATH CONVERTER
摘要 PURPOSE: An optical element inspection apparatus is provided to precisely inspect optical characteristics of optical elements by using an interferometer employing various wavelengths. CONSTITUTION: An optical element inspection apparatus includes a plurality of light sources, a beam splitter(15) for splitting light radiated from the light sources, and first and second reflection mirrors(25,30). The light sources include first light source(3) for radiating a first color light having a first wavelength, a second light source(5) for radiating a second color light having a second wavelength, and a third light source(10) for radiating a third color light having a third wavelength. The first and second light sources(3,5) are provided as an optical module(8). The light radiated from the optical module(8) is transferred to the beam splitter(15) through a first optical path converter(12).
申请公布号 KR20040079304(A) 申请公布日期 2004.09.14
申请号 KR20030014470 申请日期 2003.03.07
申请人 PARK, SEUNG HAN;YOO, JANG HOON 发明人 PARK, SEUNG HAN;YOO, JANG HOON
分类号 G01B11/25;(IPC1-7):G01B11/25 主分类号 G01B11/25
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