发明名称 |
APPARATUS FOR INSPECTING OPTICAL ELEMENTS IN WHICH LIGHT RADIATED FROM AN OPTICAL MODULE IS TRANSFERRED TO A BEAM SPLITTER THROUGH A FIRST OPTICAL PATH CONVERTER |
摘要 |
PURPOSE: An optical element inspection apparatus is provided to precisely inspect optical characteristics of optical elements by using an interferometer employing various wavelengths. CONSTITUTION: An optical element inspection apparatus includes a plurality of light sources, a beam splitter(15) for splitting light radiated from the light sources, and first and second reflection mirrors(25,30). The light sources include first light source(3) for radiating a first color light having a first wavelength, a second light source(5) for radiating a second color light having a second wavelength, and a third light source(10) for radiating a third color light having a third wavelength. The first and second light sources(3,5) are provided as an optical module(8). The light radiated from the optical module(8) is transferred to the beam splitter(15) through a first optical path converter(12).
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申请公布号 |
KR20040079304(A) |
申请公布日期 |
2004.09.14 |
申请号 |
KR20030014470 |
申请日期 |
2003.03.07 |
申请人 |
PARK, SEUNG HAN;YOO, JANG HOON |
发明人 |
PARK, SEUNG HAN;YOO, JANG HOON |
分类号 |
G01B11/25;(IPC1-7):G01B11/25 |
主分类号 |
G01B11/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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