RETICLE LOADING SYSTEM WITH ALIGN SENSOR TO PLACE RETICLE IN PRECISE POSITION OF RETICLE STAGE

摘要

PURPOSE: A reticle loading system with an align sensor is provided to place a reticle in a precise position of a reticle stage by installing an align sensor in the reticle stage, and to measure and correct the position of the reticle in real time even if an error occurs in the rotation value of a rotating arm. CONSTITUTION: The reticle(10) is mounted on the reticle stage(206). A reticle preliminarily-aligning apparatus is prepared. The rotating arm(204) receives the reticle from the reticle preliminarily-aligning apparatus and delivers the reticle to the reticle stage. The align sensor detects the position of the reticle, attached to the upper surface of the reticle stage.