SPIN COATER FOR TRANSFERRING SUBSTRATE HORIZONTALLY AT CONSTANT HEIGHT IRRESPECTIVE OF THE SIZE OF DEVICE ROTATING SUBSTRATE

摘要

PURPOSE: A spin coater is provided, to allow a substrate to be transferred horizontally at a constant height irrespective of the size of a device rotating a substrate, thereby reducing the substrate transfer time. CONSTITUTION: The spin coater comprises a spin unit(100) which comprises a substrate fixing device(110) for fixing a substrate horizontally transferred at a first height(H1) from the bottom(2) by a substrate transfer device and a rotation device(120) for rotating the substrate fixing device; a height control means(600) which controls the height of the spin unit to the bottom so as to allow a second height(H2) defined by the first bottom and the substrate fixing device to be equal to the first height; and a photosensitive material supply device(300) which supplies a photosensitive material to the substrate. Preferably the height control means is a groove formed on the bottom to allow the second height to be equal to the first height.