SUBSTRATE TRANSFER CASSETTE TO REDUCE HEIGHT AND WEIGHT OF CASSETTE

摘要

PURPOSE: A substrate transfer cassette is provided to easily transfer a cassette by reducing the height and weight of the cassette, and to prevent a substrate from being warped due to its own weight by making the front surface of the substrate uniformly supported by support wires. CONSTITUTION: At least two support bars crosses the bottom surface of the substrate to support the substrate. At least two substrate support protrusions protrude from the surface of the support bar to form an isolation space between the substrate and each support bar. The end part of the substrate support protrusion comes in contact with the substrate. Support wires(136) are installed between the support bars to prevent the substrate from being warped. The end part of the support wires is connected to the substrate support protrusion. A substrate supporting unit includes the at least support bars, the substrate support protrusions and the support wires. The first end part of the support bars is coupled to the first sidewall(113). The second end part of the support bar confronting the first end part is coupled to the second sidewall(114). A substrate transfer cassette(100) includes a case(110) including the first and second sidewalls.