发明名称 |
Semi-conductor section treatment setup for use in e.g. micro-electronic field, has locking unit preventing movement of adaptor support with respect to semi-conductor section-holder, when adaptor is positioned in section-holder |
摘要 |
The treatment setup has a tank (3) to contain treatment bath. A gripping unit has a design such that it can hold every section (1) of the semi-conductor in one dimension. An adaptor support (10) receives the sections of another dimension lesser than the former dimension. A locking unit prevents movement of the support with respect to a semi-conductor section-holder, when the adaptor is positioned in the section-holder.
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申请公布号 |
FR2852142(A1) |
申请公布日期 |
2004.09.10 |
申请号 |
FR20030002694 |
申请日期 |
2003.03.05 |
申请人 |
SOITEC SILICON ON INSULATOR |
发明人 |
POULENARD MICHEL;CERDAN ERIC |
分类号 |
B25J15/00;H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
B25J15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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