发明名称 Semi-conductor section treatment setup for use in e.g. micro-electronic field, has locking unit preventing movement of adaptor support with respect to semi-conductor section-holder, when adaptor is positioned in section-holder
摘要 The treatment setup has a tank (3) to contain treatment bath. A gripping unit has a design such that it can hold every section (1) of the semi-conductor in one dimension. An adaptor support (10) receives the sections of another dimension lesser than the former dimension. A locking unit prevents movement of the support with respect to a semi-conductor section-holder, when the adaptor is positioned in the section-holder.
申请公布号 FR2852142(A1) 申请公布日期 2004.09.10
申请号 FR20030002694 申请日期 2003.03.05
申请人 SOITEC SILICON ON INSULATOR 发明人 POULENARD MICHEL;CERDAN ERIC
分类号 B25J15/00;H01L21/00;(IPC1-7):H01L21/00 主分类号 B25J15/00
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