发明名称 PLASMA DISPLAY PANEL PRODUCING METHOD, AND PLASMA DISPLAY PANEL
摘要 A PDP producing method capable of preventing generation of defects in a PDP structure and preventing the structure from warping upward or peeking. In the photolithography, exposure to light is effected twice, by a first photomask and a second photomask which, though differing in the opening width, have the same exposure pattern. It is understood that the amount of exposure differs between an exposure region (A') for the first time exposure using the first photomask and an exposure region (B') for the second time exposure using the second photomask.
申请公布号 WO2004077484(A1) 申请公布日期 2004.09.10
申请号 WO2004JP02066 申请日期 2004.02.23
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;ADACHI, DAISUKE 发明人 ADACHI, DAISUKE
分类号 H01J11/44;G03F1/00;G03F7/20;H01J9/02 主分类号 H01J11/44
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