发明名称 |
PLASMA DISPLAY PANEL PRODUCING METHOD, AND PLASMA DISPLAY PANEL |
摘要 |
A PDP producing method capable of preventing generation of defects in a PDP structure and preventing the structure from warping upward or peeking. In the photolithography, exposure to light is effected twice, by a first photomask and a second photomask which, though differing in the opening width, have the same exposure pattern. It is understood that the amount of exposure differs between an exposure region (A') for the first time exposure using the first photomask and an exposure region (B') for the second time exposure using the second photomask. |
申请公布号 |
WO2004077484(A1) |
申请公布日期 |
2004.09.10 |
申请号 |
WO2004JP02066 |
申请日期 |
2004.02.23 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;ADACHI, DAISUKE |
发明人 |
ADACHI, DAISUKE |
分类号 |
H01J11/44;G03F1/00;G03F7/20;H01J9/02 |
主分类号 |
H01J11/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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