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发明名称
УСТРОЙСТВО ДЛЯ ФОРМИРОВАНИЯ НАНОСТРУКТУР
摘要
申请公布号
RU40537(U1)
申请公布日期
2004.09.10
申请号
RU20040107373U
申请日期
2004.03.16
申请人
发明人
分类号
H01L37/02;B82B3/00;(IPC1-7):H01L37/02
主分类号
H01L37/02
代理机构
代理人
主权项
地址
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