3-AXIS ACCELERATION SENSOR

摘要

An X-axis and a Y-axis are defined so as to pass through the center O of a diaphragm and orthogonally intersect each other. Detection electrodes are arranged on the axes symmetrically to sandwich the center O. A vibration electrode is arranged outside one of the detection electrodes on each of the axes. Moreover, a second wiring pattern is arranged for auxiliary detection of the X-axis and the Y-axis between the X-axis, Y-axis detection electrodes and the X-axis, Y-axis vibration electrodes. Furthermore, an X-axis and a Y-axis auxiliary vibration pattern are arranged at both sides of the X-axis and Y-axis vibration electrodes. With this configuration, it is possible to provide a 3-axis acceleration sensor capable of highly-accurate self diagnosis without complicating the circuit.