发明名称 Delimitation of a conducting element positioned on an insulating layer using a mask to delimit a complementary zone that is rendered insulating, notably for the fabrication of metal oxide semiconductor transistors
摘要 The delimiting of a conducting element (1) positioned on an insulating layer (2), comprises the deposition of a conducting layer (3) on the leading surface of the insulating layer disposed on a substrate (4), the formation of a mask (5) on at least one zone (6) of the conducting layer destined to form the conducting element, in a manner to delimit at least one complementary zone (7) not covered by the mask, and the removal of the mask. After the formation of the mask, the complementary zones of the conducting layer are rendered insulating. An independent claim is also included for a transistor incorporating an electrode gate produced by this method of delimiting a conducting element.
申请公布号 FR2852144(A1) 申请公布日期 2004.09.10
申请号 FR20030002721 申请日期 2003.03.05
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 DELEONIBUS SIMON
分类号 H01L21/28;H01L21/314;H01L21/316;H01L21/32;H01L21/60 主分类号 H01L21/28
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