发明名称 SEMICONDUCTOR ELEMENT AND ITS INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a method for inspecting a semiconductor element without providing a database outside. SOLUTION: This semiconductor element 101 is equipped with a nonvolatile storage element 102 for holding writably and readably manufacture data in each manufacturing process of the semiconductor element, inspection data at the probe inspection time, and inspection data at the shipping inspection time. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004251721(A) 申请公布日期 2004.09.09
申请号 JP20030041513 申请日期 2003.02.19
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAKANO MITSUYA
分类号 G01R31/28;H01L21/66;(IPC1-7):G01R31/28 主分类号 G01R31/28
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