| 摘要 |
PROBLEM TO BE SOLVED: To precisely position an inspected face in a position where contrast of an interference fringe about the inspected face gets excellent, by using an objective lens arranged between the inspected face and a reference face, while restraining an interference fringe noise from a non-inspected face of the specimen. SOLUTION: The objective lens 41 of a focal distance F is arranged between a reference plate 16 and the specimen 17 in a position separated by a distance D from the reference face 16a, and the specimen 17 is moved along a direction approached to the reference plate 16. Brightness in an aperture of the objective lens 41 is observed, and the specimen 17 is stopped in a point when the aperture of the objective lens 41 gets bright at first. A difference between a distance D+F from a specimen face 17a to the reference face 16a and a target distance L<SB>0</SB>is found therein to move the the specimen 17 along a direction separated from the objective lens 41 by a distance corresponding to the difference, and a distance between the inspected face 17a and the reference face 16a is conformed with the the target distance L<SB>0</SB>. COPYRIGHT: (C)2004,JPO&NCIPI
|
