| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing, completely preventing helium gas from flowing into a small gap and allowing easy and accurate leak check for all internal spaces, and to provide its leak check method. SOLUTION: The static pressure gas bearing to be used under vacuum environment comprises a fixed portion having at least one smooth surface and a movable portion to be moved along the smooth surface of the fixed portion. In the movable portion, an air pad is formed for releasing gas supplied from the outside to the small gap formed opposite to the smooth surface of the fixed portion. On the outer periphery of the air pad, a pressure reducing groove is provided for collecting the gas released to at least the small gap and exhausting it via a pipe with a pump. A shut-off groove is provided on the further outer periphery of the pressure reducing groove. COPYRIGHT: (C)2004,JPO&NCIPI
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