发明名称 |
Reduction of the shear stress in copper via's in organic interlayer dielectric material |
摘要 |
Interconnect layers on a semiconductor body containing logic circuits (microprocessors, Asics or others) or random access memory cells (DRAMS) are formed in a manner to significantly reduce the number of shorts between adjacent conductor/vias with narrow separations in technologies having feature sizes of 0.18 microns or smaller. This is accomplished by etching to form recessed copper top surfaces on each layer after a chemical-mechanical polishing process has been completed. The thickness of an applied barrier layer, on the recessed copper surfaces, is controlled to become essentially co-planar with the surrounding insulator surfaces. A thicker barrier layer eliminates the need for a capping layer. The elimination of a capping layer results in a reduction in the overall capacitive coupling, stress, and cost.
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申请公布号 |
US2004175921(A1) |
申请公布日期 |
2004.09.09 |
申请号 |
US20030379346 |
申请日期 |
2003.03.04 |
申请人 |
INFINEON TECHNOLOGIES NORTH AMERICA CORP. |
发明人 |
COWLEY ANDY;KALTALIOGLU ERDEM;HOINKIS MARK;STETTER MICHAEL |
分类号 |
H01L21/768;(IPC1-7):H01L21/476 |
主分类号 |
H01L21/768 |
代理机构 |
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地址 |
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