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发明名称
HERSTELLUNG EINES ABSOLUTEN DÜNNSCHICHTSENSORS MIT MIKROBALKEN
摘要
申请公布号
DE69726009(T2)
申请公布日期
2004.09.09
申请号
DE19976026009T
申请日期
1997.12.29
申请人
HONEYWELL, INC.
发明人
HERB, R.;BURNS, W.
分类号
G01L9/00;H01L29/84;(IPC1-7):G01L9/00;G01L1/16
主分类号
G01L9/00
代理机构
代理人
主权项
地址
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