PROJECTION/RECESS DETERMINING METHOD ON SPECIMEN AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a determining method and its device suitable to determine whether it is projecting or recessed on a pattern comprising lines and spaces formed on a specimen.

SOLUTION: According to this method and its device, when one foot portion possessed by a peak of a profile formed based on charged particle beam scanning converges slowly in comparison with the other foot portion, a region on the specimen corresponding to the one foot portion is determined to be a projecting part. Or else, when the one foot portion sharply converges in comparison with the other foot portion, a region on the specimen corresponding to the one foot portion is determined to be a recessed part.

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