发明名称 |
GaN SINGLE CRYSTAL SUBSTRATE, NITRIDE SEMICONDUCTOR EPITAXIAL SUBSTRATE, FIELD EMISSION TYPE CATHODE DEVICE, FIELD EMISSION DISPLAY DEVICE AND ITS MANUFACTURING METHOD |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a GaN single crystal substrate, a nitride semiconductor epitaxial substrate, a field emission type cathode device and a field emission display device of which the dot structures of the substrate are easily formed, and to provide a method for manufacturing them. <P>SOLUTION: The GaN single crystal substrate 10 is characterized in that a plurality of micro-projections 14A, 14B are formed on the surface 12a by subjecting it to a heat-treatment process in a gas atmosphere at least containing NH<SB>3</SB>. The micro-projections 14A, 13B having dot structures on the substrate surface 12a are formed in the GaN single crystal substrate 10 by the heat-treatment. The dot structures in the GaN single crystal substrate 10 can be formed by a simple heat-treatment alone, which does not necessarily need a particular surface heat-treatment process or many steps. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
申请公布号 |
JP2004250314(A) |
申请公布日期 |
2004.09.09 |
申请号 |
JP20030116203 |
申请日期 |
2003.04.21 |
申请人 |
SUMITOMO ELECTRIC IND LTD;INST OF MATERIALS RESEARCH & ENGINEERING |
发明人 |
UENO MASANORI;TAKASUKA EIRYO;PEN CHEN;SUUJIN CHUA |
分类号 |
C30B29/38;C30B25/18;H01J1/304;H01J9/02;H01J29/04;H01J31/12;(IPC1-7):C30B29/38 |
主分类号 |
C30B29/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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