| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator for driving a flow control valve that can be operated stably at high temperatures and enables pulse driving, by using not piezoelectric elements including lead, such as conventional PZT type piezoelectric element, but non-lead type piezoelectric elements. SOLUTION: To constitute the actuator 25, SCNN type piezoelectric elements are used as non-lead type piezoelectric elements. By supplying pulse pressure to the actuator 25 from outside, a piston is moved in the left side in the figure by an operating part 28 of the actuator 25, a needle valve 13 is moved in the left side in the figure via fluid in a differential pressure chest 34, and an opening 15 of a nozzle 16 is closed. When the operating part 28 is moved in the right direction in the figure at the time of release of pulse pressure to the actuator 25, force to move the needle valve 13 in the right direction by fluid pressure of a fluid chest 33 is applied. Therefore, the fluid in the differential pressure chest 34 moves the piston 23 in the right direction in the figure by following the movement of the actuator 28. Afterward, the same operation is repeated. COPYRIGHT: (C)2004,JPO&NCIPI
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