| 摘要 |
PROBLEM TO BE SOLVED: To transfer a substrate in at least three orthogonal directions in a transfer device which moves a base mount up and down with its both sides fixed, and also to decrease an installation space of the transfer device as much as possible. SOLUTION: An articulated arm 141 for supporting a holding section 140 of the substrate G is rotatably installed on the base mount 142. On both sides of the base mount 142, lift drive sections 143 and 144 supporting the both sides of the base mount 142 and move the base mount 142 up and down, are installed. The lift drive sections 143 and 144 are arranged towards a direction H oblique to the X direction in which the substrate G is transferred. Due to this structure, the holding section 140 can move in the Y direction, too, in addition to the X direction, without being interrupted by the lift drive sections 143, 144, making it possible to transfer the substrate G in at least three directions. COPYRIGHT: (C)2004,JPO&NCIPI
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