| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To automatically acquire numerous images from testpieces with mutually different fields of view, and in parallel with acquisition of the images, the acquired images are subjected to a prescribed image processing to distinguish whether or not there is a targeted structure in the images. <P>SOLUTION: A control means 4 acquires the images within a specified test range of testpieces (S3) by controlling (S2) the testpiece stage 2 of TEM1 when parameters are inputted (S1). Then, the acquired images are subjected to analytical processing immediately by the control means 4 (S6). In this way, acquisition of the images and analysis are simultaneously made in parallel. As for the analytical processing, as an index to express the probability that the targeted structure is reflected in the images, a processing which attaches brightness score based on the brightness of the images, a treatment which attaches profile score based on profile of figure in the images, a processing which attaches edge score based on linear figure in the images, and a processing which attaches comprehensive score based on these brightness score, profile score, and edge score are carried out. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
