| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a scanning electron microscope which efficiently performs the distance measurement on a plurality of measurement items at once, and which easily registers, verifies, and changes the parameters for the automatic distance measurement. <P>SOLUTION: The measurement on the plurality of items is performed, in which the AMP (auto measurement parameter) registration is performed for the setting of the parameters regarding the preparation of a line profile from a SEM (scanning electron microscope) image, as the common condition to all measurement items, and in which the plurality of AMP registrations for the edge detection method and the distance measurement value calculation method are performed. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
