| 摘要 |
PROBLEM TO BE SOLVED: To provide a table apparatus capable of moving in multiple directions and achieving compactness and thinness. SOLUTION: This XYθtable apparatus 100 is constituted by layering and arranging a fixed support body 101, a Y table 102, and an X table 103. The Y table 102 is provided in such a way as to move with respect to the fixed support body 101 along the direction of a Y axis, and the X table 103 is provided in such a way as to move with respect to the Y table 102 along the direction of an X axis. A rotating motor 104 in a state fastened to a rotating motor connecting ring 105 and housed in a through hole 103a of the X table 103 is fixed to the X table 103 by the rotating motor connecting ring 105. COPYRIGHT: (C)2004,JPO&NCIPI
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