发明名称 |
Susceptor apparatus for inverted type MOCVD reactor |
摘要 |
The present invention discloses a susceptor mounting assembly for holding semiconductor wafers in an MOCVD reactor during growth of epitaxial layers on the wafers, that is particularly adapted for mounting a susceptor in an inverted type reactor chamber. It includes a tower having an upper and lower end with the upper end mounted to the top inside surface of the reactor chamber and a susceptor is arranged at the tower's lower end. Semiconductor wafers are held adjacent to the susceptor such that heat from the susceptor passes into wafers. A second embodiment of a susceptor mounting assembly according to the invention also comprises a tower having an upper and lower end. The tower's upper end is mounted to the top inside surface of the reactor chamber. A susceptor is housed within a cup and the cup is mounted to the tower's lower end.
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申请公布号 |
US2004175939(A1) |
申请公布日期 |
2004.09.09 |
申请号 |
US20030382198 |
申请日期 |
2003.03.04 |
申请人 |
CREE LIGHTING COMPANY. |
发明人 |
NAKAMURA SHUJI;DENBAARS STEVEN;BATRES MAX;COULTER MICHAEL |
分类号 |
C23C16/458;C23C16/46;C30B25/10;C30B25/12;(IPC1-7):H01L21/44;H01L21/302;H01L21/461 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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