发明名称 PERMANENT MASK RESIST AND USE OF PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a permanent mask resist which exhibits high moisture resistant insulation performance without deteriorating flexibility, solder heat resistance and chemical resistance as the permanent mask resist, and to provide a manufacture method of the permanent mask resist and a permanent mask resist laminate substrate. <P>SOLUTION: The permanent mask resist has a group expressed by ordinary formula (I), wherein X denotes metal ion of n-valence and n is valence number of the metal ion. In the manufacture method of the permanent mask resist, the layer of photosensitive resin composition on the substrate is irradiated with active light and, thereafter, is washed and developed with washing aqueous solution and developer which are made by mixing or dissolving metal ion. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004252485(A) 申请公布日期 2004.09.09
申请号 JP20040142849 申请日期 2004.05.12
申请人 HITACHI CHEM CO LTD 发明人 YOSHIDA TETSUYA;SASAHARA NAOKI;TSUCHIYA KATSUNORI;NAKANO AKIO
分类号 G03F7/004;G03F7/32;G03F7/40;H05K3/28 主分类号 G03F7/004
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