| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein measuring precision is not satisfactory because contact resistance gets high due to increase of positional shift between an electrode of a semiconductor device and a contact terminal of a characteristic measuring tool, when setting the semiconductor device to the characteristic measuring tool, in a conventional measuring method, when measuring a characteristic of the semiconductor device, and a problem wherein workability is also not satisfactory because a worker is required to carry out execution from a side face for confirmation of the contact. SOLUTION: This tool comprises a main body and a sub-unit connected to a measuring instrument, the sub-unit is provided with the first pocket, and the main body is provided with the second pocket. Dimensional change of the first pocket allows coping with the plurality of semiconductor devices different in dimensions. The worker executes measurement with no anxiety, and the precision is also enhanced, because the positional shift of the electrode is eliminated in the semiconductor device. COPYRIGHT: (C)2004,JPO&NCIPI
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