SIDE FORCE MEASURING DEVICE OF LINEAR MOTOR

摘要

PROBLEM TO BE SOLVED: To provide a side force measuring device that can measure the side force of a linear motor with high accuracy. SOLUTION: A movable stage 5 arranged with the linear motor 2 of which the moving member 22 can move in the vertical direction is arranged on a base 3, the movable stage 5 is movably supported to a direction orthogonal to the vertical direction by an air bearing 7, and a force in the y-direction of the movable stage 5 is detected by a load cell 9. COPYRIGHT: (C)2004,JPO&NCIPI