| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a functional element which includes a processing step of processing the substrate of a functional element by fixing the substrate on a base material and, in addition, by which the substrate can be fixed stably and peeled easily during the course of the processing step. SOLUTION: The method of manufacturing the functional element includes a self-releasable base material preparing step of preparing a self-releasable base material having a base material, a layer containing a photocatalyst formed on the base material, and a self-releasable adhesive layer containing a layer made to have a self-releasable property by the action of the photocatalyst when energy is projected upon the layer; an adhering step of adhering the substrate of the functional element to the self-releasable adhesive layer; and a processing step of processing the substrate of the functional element. The method also includes an energy projecting step of projecting energy upon the self-releasable adhesive layer, and a peeling step of peeling the substrate of the functional element from the self-releasable base material. COPYRIGHT: (C)2004,JPO&NCIPI
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