Remote maintenance system and remote maintenance method for semiconductor manufacturing apparatus

摘要

A factory-side client 100 at a factory where a semiconductor manufacturing apparatus is installed and a vendor-side server 200 at a vendor who executes maintenance management for semiconductor manufacturing apparatuses are connected to the Internet 300 which is a network enabling bidirectional communication and thus can exchange data with each other. The client 100 collects status information with regard to the apparatus and transmits the status information to the server 200. Based upon the status information, the server 200 executes a judgment as to whether or not an abnormality or a semi-abnormality has occurred in the apparatus, infers a probable cause and the corresponding corrective measures to be taken by conducting a search of the database in the event of an abnormality or a semi-abnormality and provides the client 100 with maintenance information and an instruction indicating the cause and corrective measures.