| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of setting a coarse mode by using a resonance phenomenon when a high traveling speed is needed, and an inching mode by driving the actuator with an analog voltage when highly accurate positioning is needed, and capable of switching between high-speed traveling (coarse) and highly accurate positioning (inching). <P>SOLUTION: In the piezoelectric actuator, at least two piezoelectric elements are arranged at an arbitrary cross angle, one end of each of the piezoelectric elements is jointed with an oscillator, the other end of each of the piezoelectric elements is joined to a V-shape base, and front ends of the oscillators are abutted against a movable member. The piezoelectric elements and the oscillators are oscillated by applying a high frequency voltage which is nearly equal to the natural frequencies of the piezoelectric elements and the oscillators to the piezoelectric elements with an arbitrary phase difference. The piezoelectric actuator includes the coarse mode for moving the movable member at a high speed by generating elliptic movement at the oscillator by the oscillation, and the inching mode for inching the movable member by individually expanding and shrinking the piezoelectric elements by applying arbitrary voltages to the piezoelectric elements. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
