| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for holding a semiconductor wafer which can accurately detect whether or not the wafer was chucked on a stage. SOLUTION: The wafer 2 is transported to the stage 1, and is chucked by pushing the wafer 2 in its central direction by rollers 12a to 12d. When a power supply 17a is turned on under the accurately chucked condition of the wafer, a current flows through a conduction part 13a of the roller 12a, the semiconductor wafer 2, and a conduction part 13b of the roller 12b, and a predetermined current value is detected by a current meter 17a to indicate that the wafer 2 is exactly held by the rollers 12a, 12b. When a power supply 17b is turned on, a predetermined current is detected by a current meter 17b. Under this condition, it is detected that the rollers 12c and 12d accurately chuck the wafer 2. COPYRIGHT: (C)2004,JPO&NCIPI |
