SUPERCRITICAL REACTION APPARATUS, METHOD FOR RECOVERING SUPERCRITICAL FLUID, AND METHOD FOR PRODUCING ELECTRO-OPTICAL PANEL USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a supercritical reaction apparatus by which the recovery rate of a supercritical fluid is elevated.

SOLUTION: The supercritical reaction apparatus 100 has a washing vessel 14 connected to a pipe L2 for leading the supercritical fluid supplied from a pressure tank 10, a gas-liquid separation part 20 which reduces the pressure of an inflow material containing the supercritical fluid introduced with the completion of reaction treatment in the vessel 14 and separates the fluid into gas and liquid, and a change-over part 30 which leads the inflow material to the pressure tank 10 through a pipe L4 not through the gas-liquid separation part 20 after a prescribed point of time in a reaction period in the vessel 14.

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