发明名称 DEPOSITION SUBSTRATE AND APPARATUS FOR MANUFACTURING DEPOSITED PLATE
摘要 PROBLEM TO BE SOLVED: To prevent deposition substrates 14 from being broken by preventing direct contact between sides of the adjacent deposition substrates 14, 14. SOLUTION: The deposition substrates 14 are conveyed into/out of an apparatus and dipped in molten metal in the apparatus to have molten object substances deposited on a surface 14a of each deposition substrate 14 for obtaining deposited plates 2. The deposition substrates 14 each comprise the substrate surface 14a to be dipped in the molten metal, and projections 14c, 14c which are formed on opposite sides in a conveying direction. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004253581(A) 申请公布日期 2004.09.09
申请号 JP20030041974 申请日期 2003.02.20
申请人 SHINKO ELECTRIC CO LTD 发明人 NAKAI YASUHIRO;TSUDA MASANORI;TADOKORO MASAHIRO;NISHIKAWA HIROKI
分类号 B22D21/00;B22D25/02;C30B28/10;C30B29/06;H01L21/208;(IPC1-7):H01L21/208 主分类号 B22D21/00
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