Method for depositing and patterning carbon nanotubes using chemical self-assembly process

摘要

Disclosed herein is a method for forming a pattern of carbon nanotubes which includes forming a pattern on a surface-treated substrate using a photolithographic process, and laminating carbon nanotubes thereon using a chemical self-assembly process so as to form the carbon nanotubes in a monolayer or multilayer structure. According to the method for forming a pattern of carbon nanotubes, a monolayer or multilayer carbon nanotube pattern can be easily formed on the substrate, e.g., glass, a silicon wafer and a plastic. Accordingly, the method can be applied to form patterned carbon nanotube layers having a high conductivity, and thus will be usefully utilized in the manufacturing processes of energy storages, for example, solar cells and batteries, flat panel displays, transistors, chemical and biological sensors, semiconductor devices and the like.