SYSTEM AND METHOD FOR INSPECTION USING WHITE LIGHT INTERFEROMETRY,申请号EP20010995118-传众专利搜索

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发明名称	SYSTEM AND METHOD FOR INSPECTION USING WHITE LIGHT INTERFEROMETRY
摘要
申请公布号	EP1454113(A1)	申请公布日期	2004.09.08
申请号	EP20010995118	申请日期	2001.12.05
申请人	SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS, INC.	发明人	MATHUR, SANJEEV;CHANG, CHU-YIN
分类号	G01B9/02;G01B11/24;G01N21/95;G01N21/956;H05K13/08;(IPC1-7):G01B11/24	主分类号	G01B9/02
代理机构		代理人
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