发明名称 |
Apparatus and method for examining specimen with a charged particle beam |
摘要 |
An apparatus for examining a specimen with a beam of charged particles. The apparatus comprises a particle source for providing a beam of charged particles and an optical device for directing said beam of charged particles onto said specimen to be examined. Furthermore, a gas supply provides inert gas to the area of incidence of said beam of charged particles onto said specimen. The specimen can be loaded into a vacuum chamber. <IMAGE>
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申请公布号 |
EP1455379(A2) |
申请公布日期 |
2004.09.08 |
申请号 |
EP20040009739 |
申请日期 |
1999.07.02 |
申请人 |
ICT, INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
FEUERBAUM, HANS-PETER;WINKLER, DIETER |
分类号 |
G01Q30/12;G01Q30/16;H01J37/02;H01J37/28;(IPC1-7):H01J37/02 |
主分类号 |
G01Q30/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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