发明名称 |
Method and apparatus for production of fluorine-containing polyimide film |
摘要 |
A method for producing a fluorine-containing polyimide film excelling in heat resistance, resistance to chemicals, water repellency, dielectric properties, electrical properties, and optical properties and a spin coater suitable for the method are to be provided. A method for the production of a fluorine-containing polyimide film which comprises forming a coating film of a fluorine-containing polyimide precursor in an atmosphere having a relative humidity thereof adjusted to a level of not more than 50 RH% and then subjecting the fluorine-containing polyimide precursor to heat treatment thereby forming a fluorine-containing polyimide film is provided. By adjusting the relative humidity in accordance with this method, the fluorine-containing polyimide precursor can be prevented from being decomposed by the absorption of moisture. This measure effectively prevents the fluorine-containing polyimide film from forming piriform spots and scratches. <IMAGE> |
申请公布号 |
EP1454945(A1) |
申请公布日期 |
2004.09.08 |
申请号 |
EP20040251311 |
申请日期 |
2004.03.05 |
申请人 |
NIPPON SHOKUBAI CO., LTD. |
发明人 |
TAJIRI, KOZO;GOTO, SHINICHI;ASAKO, YOSHINOBU;KAWADA, KUMIKO |
分类号 |
B05D1/00;C08G73/10;C08J5/18;H05K1/03 |
主分类号 |
B05D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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