发明名称 METHOD FOR PRODUCING A LAYERED ASSEMBLY AND A LAYERED ASSEMBLY
摘要 An arrangement and process for producing a circuit arrangement is disclosed. The process includes having a layer arrangement, in which two electrically conductive interconnects running substantially parallel to one another are formed on a substrate. At least one auxiliary structure is formed on the substrate and between the two interconnects, running in a first direction, which first direction includes an angle of between 45 degrees and 90 degrees with a connecting axis of the interconnects, running orthogonally with respect to the two interconnects, the at least one auxiliary structure being produced from a material which allows the at least one auxiliary structure to be selectively removed from a dielectric layer. The dielectric layer is formed between the two interconnects, in such a manner that the at least one auxiliary structure is at least partially covered by the dielectric layer.
申请公布号 EP1454355(A2) 申请公布日期 2004.09.08
申请号 EP20020779171 申请日期 2002.10.23
申请人 INFINEON TECHNOLOGIES AG 发明人 KREUPL, FRANZ;HOENLEIN, WOLFGANG;STEINHOEGL, WERNER
分类号 H01L21/768;H01L51/30 主分类号 H01L21/768
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