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发明名称
摘要
申请公布号	JP3564313(B2)	申请公布日期	2004.09.08
申请号	JP19990020944	申请日期	1999.01.29
申请人		发明人
分类号	G11B5/31;C23C14/34;G11B5/39;H01L21/31;H01L21/316;(IPC1-7):G11B5/31	主分类号	G11B5/31
代理机构		代理人
主权项
地址

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