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发明名称
摘要
申请公布号
JP3563936(B2)
申请公布日期
2004.09.08
申请号
JP19970265689
申请日期
1997.09.30
申请人
发明人
分类号
G03F7/20;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
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代理人
主权项
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