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经营范围
发明名称
Fluorinated acrylic compounds, methods for preparation of the compounds and photoresist compositions containing same
摘要
申请公布号
EP1449839(A3)
申请公布日期
2004.09.08
申请号
EP20040003810
申请日期
2004.02.19
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
ABDOURAZAK, ATTEYE HOUSSEIN;MARKLEY, THOMAS JOHN
分类号
C07D309/10;C08F20/28;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):C07D309/10
主分类号
C07D309/10
代理机构
代理人
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