发明名称 |
RASTER SHAPED BEAM, ELECTRON BEAM EXPOSURE STRATEGY USING A TWO DIMENSIONAL MULTIPLEXEL FLASH FIELD |
摘要 |
An apparatus includes: a rasterizer which rasterizes a surface of the substrate into pixels and outputs gray level values, where the gray level values specify a proportion of a pixel that overlaps with the pattern; a buffer coupled to receive and store the gray level values from the rasterizer; a flash converter coupled to receive the gray level values from the buffer, where the flash converter outputs shape data that define a flash field; a dose value circuitry coupled to the rasterizer, where the dose value circuitry computes dose values associated with the shape data; a converter coupled to receive the shape data from the flash converter and associated dose values from the dose value circuitry, where the converter outputs signals that specify a shape of the flash field, duration of the flash field, and a position of the flash field on the substrate; and a charged particle beam column coupled to receive the signals from the converter, and which generates the flash field as specified by the signals from the converter. |
申请公布号 |
EP1454336(A2) |
申请公布日期 |
2004.09.08 |
申请号 |
EP20020734302 |
申请日期 |
2002.05.07 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WINTER, STACEY, J.;RISHTON, STEPHEN, A.;VARNER, JEFFREY, K.;SAGLE, ALLAN, L.;VENEKLASEN, LEE, H. DI;WANG, WEIDONG |
分类号 |
G03F7/20;H01J37/302;H01J37/305;H01J37/317;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|