| 摘要 |
A plurality of fiducial mark plates, on which a plurality of fiducial marks are dispersedly arranged by each measurement sequence which uses the fiducial mark, are arranged on the periphery of a substrate holder on the substrate stage so as to make the positional relationship between the substrate holder constant. This allows the fiducial mark plates to be arranged on the substrate stage at a place where there is little space. In addition, the main controller performs various measurement sequences that include the detection operation to detect the positional information on each fiducial mark using the mark detection system. Accordingly, it becomes possible to downsize the substrate stage, which leads to a reduction in footprint, while maintaining the measurement functions.
|
