发明名称 |
Mass production of cross-section TEM samples by focused ion beam deposition and anisotropic etching |
摘要 |
A method of preparing a TEM sample. A focused ion beam is used to deposit a mask on the material to be sampled. Reactive ion etching removes material not protected by the mask, leaving a wall thin enough to be imaged by TEM.
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申请公布号 |
US6786978(B2) |
申请公布日期 |
2004.09.07 |
申请号 |
US20010921324 |
申请日期 |
2001.08.02 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
TSUNG LANCY;ANCISO ADOLFO |
分类号 |
G01N1/32;(IPC1-7):H01L29/06 |
主分类号 |
G01N1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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