Damped micromechanical device

摘要

A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.