发明名称 CENTER TABLE FRAME HEATING APPARATUS OF TAPE MOUNT EQUIPMENT FOR IMPROVING TAPING ADHESIVE STRENGTH BETWEEN TAPE AND CENTER TABLE FRAME
摘要 PURPOSE: A center table frame heating apparatus of tape mount equipment is provided to improve the taping adhesive strength between a tape and a center table frame by installing a heating unit between an external ring and an internal ring. CONSTITUTION: A heating unit is installed between an external ring(11) and an internal ring(12) in order to heat a center table frame. The heating unit is formed with a ring heater(21) having a shape of ring and includes a heating line for supplying electric power. An insertion side(14) having a predetermined depth is formed at one side of the external ring. An insertion groove(15) is formed along an outer surface of the insertion side. A projection(16) is formed on an outer circumference of the internal ring.
申请公布号 KR100448928(B1) 申请公布日期 2004.09.06
申请号 KR19970063372 申请日期 1997.11.27
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO, JONG CHEON;KIM, SANG GEUN
分类号 H01L21/78;(IPC1-7):H01L21/78 主分类号 H01L21/78
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