发明名称 CARRIER HOLDER FOR CLEANING CARRIER TO PREVENT DAMAGE TO CARRIER
摘要 PURPOSE: A carrier holder for cleaning a carrier is provided to clean a FOSB(Front Opening Shipping Box) by using an existing FOUP(Front Open Unified Pod) apparatus. CONSTITUTION: The first lateral part(140) is installed at a base part(120). The first lateral part is opposite to one side of a carrier. The second lateral part(160) is installed at the base part. The second lateral part is opposite to the other side of the carrier. A cover part(190) is connected to an upper part of the first lateral part and is coupled to or decoupled from the second lateral part. An insertion part(180) is inserted into the inside of the carrier. The carrier is formed with a FOUP or a FOSB. The insertion part has the predetermined height enough for coupling the cover part to the second lateral part.
申请公布号 KR20040077008(A) 申请公布日期 2004.09.04
申请号 KR20030012372 申请日期 2003.02.27
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, HYEOK GI;KIM, SANG YONG;NAM, TAE YEONG
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
代理机构 代理人
主权项
地址
您可能感兴趣的专利