| 摘要 |
PURPOSE: An electronic beam recording substrate is provided to retain a resist film where electronic beam information is recorded, and to have an outer layer area consisting of a material for suppressing an expansion of a dispersive distribution diameter of electrons, thereby accomplishing high sensitivity for the resist film. CONSTITUTION: A vacuum chamber(1) is provided with as follows. A spindle motor(5) rotates a master disk(4) while maintaining the disk(4) in horizontal direction. A mobile stage(6) advances and retreats the spindle motor(5). A mirror(7) is attached to one end of the mobile stage(6). Photo sensors(8,9) detect a focal position of an electronic beam. The master disk(4) mounted at a turn table of the spindle motor(5) has a resist film deposited on an electronic beam column(2). A distance measurement unit(12) for detecting a reflected light and irradiating a laser beam on the mirror(7) detects a mobile position of the mobile stage(6), and supplies the detected mobile position to a controller(3). The controller(3) performs a feedback control process of the mobile stage(6). |
