METHOD FOR FABRICATING FLYING HEAD BY USING SIL METHOD, CONCERNED WITH PREVENTING SIL FROM BEING POLLUTED BY ADHESIVES

摘要

PURPOSE: A method for fabricating a flying head by using an SIL(Solid Immersion Lens) method is provided to dissolve all soluble adhesives located on an upper side of an SIL to remove the soluble adhesives, and to locate adhesives for fixing the SIL on a side only. CONSTITUTION: A hole is formed on a slider(1). An SIL(20) whose the upper side has semi-spherical shape is inserted into the hole. A location of the inserted SIL(20) is fixed by using soluble adhesives. The inserted SIL(20) is fixed to the hole of the slider(1) by using nonsoluble adhesives(42). The slider(1) and a lower side of the SIL(20) are cut. The soluble adhesives are removed by using a solvent. An objective lens(3) is adhered to the upper part of the SIL(20) with the nonsoluble adhesives(42).