PAD CONDITIONER FOR CMP EQUIPMENT FOR STABLE CONDITIONING PROCESS

摘要

PURPOSE: A pad conditioner for CMP equipment is provided to perform stably a conditioning process by lengthening a lifetime and widening a pressure transmission range. CONSTITUTION: A disk holder includes a polishing disk and is tangent to a surface of a polishing pad. A conditioner head includes a driver. The disk holder is coupled to the driver. The driver is used for driving the disk holder. The disk holder includes a driving sleeve part and a disk-shaped flexure(164). The driving sleeve part is coupled to the conditioner head in order to receive the driving force and the pressure. The disk-shaped flexure is coupled to the driving sleeve part in order to receive the uniform pressure.